Inventor
ROCKROHR JAMES
US5 patents
⚠️ This page may combine multiple inventors who share the name “ROCKROHR JAMES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
3 patentsUS6218671B1Apr 17, 2001
On-line dynamic corrections adjustment method
NIKON CORP36 citations89
US6188071B1Feb 13, 2001
Feedback method for increasing stability of electron beams
NIKON CORP11 citations69
US6521903B1Feb 18, 2003
Deflection noise reduction in charged particle beam lithography
NIKON CORP0 citations39