Inventor
TANG SHANE
US9 patents
Patents
9 patentsUS9875891B2Jan 23, 2018
Selective inhibition in atomic layer deposition of silicon-containing films
LAM RES CORP478 citations99
US9564312B2Feb 7, 2017
Selective inhibition in atomic layer deposition of silicon-containing films
LAM RES CORP415 citations99
US9502238B2Nov 22, 2016
Deposition of conformal films by atomic layer deposition and atomic layer etch
LAM RES CORP55 citations97
US9076646B2Jul 7, 2015
Plasma enhanced atomic layer deposition with pulsed plasma exposure
LAM RES CORP81 citations95
US9589790B2Mar 7, 2017
Method of depositing ammonia free and chlorine free conformal silicon nitride film
LAM RES CORP22 citations94
US10804099B2Oct 13, 2020
Selective inhibition in atomic layer deposition of silicon-containing films
LAM RES CORP13 citations86
US11832533B2Nov 28, 2023
Conformal damage-free encapsulation of chalcogenide materials
LAM RES CORP0 citations60
US11239420B2Feb 1, 2022
Conformal damage-free encapsulation of chalcogenide materials
LAM RES CORP1 citations60
US12230495B2Feb 18, 2025
Method of depositing silicon nitride films
LAM RES CORP0 citations49