Inventor
KOMATSU MITSUNORI
JP12 patents
Patents
12 patentsUS6443816B2Sep 3, 2002
Method and apparatus for cleaning polishing surface of polisher
EBARA CORP32 citations92
US6338671B1Jan 15, 2002
Apparatus for supplying polishing liquid
EBARA CORP41 citations91
US6280300B1Aug 28, 2001
Filter apparatus
EBARA CORP31 citations91
US6758728B2Jul 6, 2004
Method and apparatus for cleaning polishing surface of polisher
EBARA CORP10 citations73
US10414018B2Sep 17, 2019
Apparatus and method for regulating surface temperature of polishing pad
EBARA CORP4 citations72
US6508695B2Jan 21, 2003
Pure water reusing system
EBARA CORP12 citations72
US10903101B2Jan 26, 2021
Substrate processing apparatus and method for detecting abnormality of substrate
EBARA CORP6 citations66
US12472601B2Nov 18, 2025
Method of checking leakage of fluid and polishing apparatus
EBARA CORP0 citations60
US11992915B2May 28, 2024
System for adjusting pad surface temperature and polishing apparatus
EBARA CORP0 citations50
US11898940B2Feb 13, 2024
Leak detection system and inspection method for the system
EBARA CORP0 citations49
US9373528B2Jun 21, 2016
Substrate processing apparatus
EBARA CORP0 citations41
US10373845B2Aug 6, 2019
Substrate cleaning apparatus and substrate cleaning method
EBARA CORP0 citations40