Inventor
TANIKAWA MUTSUMI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “TANIKAWA MUTSUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
7 patentsUS6338671B1Jan 15, 2002
Apparatus for supplying polishing liquid
EBARA CORP41 citations91
US6280300B1Aug 28, 2001
Filter apparatus
EBARA CORP31 citations91
US6358125B2Mar 19, 2002
Polishing liquid supply apparatus
EBARA CORP39 citations89
US9156130B2Oct 13, 2015
Method of adjusting profile of a polishing member used in a polishing apparatus, and polishing apparatus
EBARA CORP11 citations83
US9108292B2Aug 18, 2015
Method of obtaining a sliding distance distribution of a dresser on a polishing member, method of obtaining a sliding vector distribution of a dresser on a polishing member, and polishing apparatus
EBARA CORP19 citations83
US6508695B2Jan 21, 2003
Pure water reusing system
EBARA CORP12 citations72
US9533395B2Jan 3, 2017
Method and apparatus for conditioning a polishing pad
EBARA CORP1 citations50