Inventor
RAI VIKRANT
US6 patents
⚠️ This page may combine multiple inventors who share the name “RAI VIKRANT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
4 patentsUS11832533B2Nov 28, 2023
Conformal damage-free encapsulation of chalcogenide materials
LAM RES CORP0 citations60
US11239420B2Feb 1, 2022
Conformal damage-free encapsulation of chalcogenide materials
LAM RES CORP1 citations60
US12230495B2Feb 18, 2025
Method of depositing silicon nitride films
LAM RES CORP0 citations49
US12577666B2Mar 17, 2026
Precursor dispensing systems with line charge volume containers for atomic layer deposition
LAM RES CORP0 citations45