Inventor
VU KIM N
US13 patents
Patents
13 patentsUS5992463ANov 30, 1999
Gas panel
UNIT INSTR INC153 citations98
US6044701AApr 4, 2000
Thermal mass flow controller having orthogonal thermal mass flow sensor
UNIT INSTR INC95 citations97
US6474700B2Nov 5, 2002
Gas panel
UNIT INSTR INC50 citations96
US6435215B1Aug 20, 2002
Gas panel
UNIT INSTR INC35 citations96
US6293310B1Sep 25, 2001
Gas panel
UNIT INSTR INC75 citations96
US6192938B1Feb 27, 2001
Gas panel
UNIT INSTR INC43 citations96
US6189570B1Feb 20, 2001
Gas panel
UNIT INSTR INC56 citations96
US6142539ANov 7, 2000
Gas panel
UNIT INSTR INC39 citations96
US5803507ASep 8, 1998
Apparatus for handling process fluid
UNIT INSTR INC62 citations96
US5730181AMar 24, 1998
Mass flow controller with vertical purifier
UNIT INSTR INC76 citations95
US5303731AApr 19, 1994
Liquid flow controller
UNIT INSTR INC61 citations95
US6394138B1May 28, 2002
Manifold system of removable components for distribution of fluids
UNIT INSTR INC110 citations94
US6374859B1Apr 23, 2002
Manifold system for enabling a distribution of fluids
UNIT INSTR INC47 citations94