Inventor
MIYA HIRONOBU
JP12 patents
⚠️ This page may combine multiple inventors who share the name “MIYA HIRONOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
7 patentsUS7779785B2Aug 24, 2010
Production method for semiconductor device and substrate processing apparatus
HITACHI INT ELECTRIC INC21 citations92
US8039404B2Oct 18, 2011
Production method for semiconductor device
HITACHI INT ELECTRIC INC9 citations84
US7981815B2Jul 19, 2011
Semiconductor device producing method and substrate processing apparatus
HITACHI INT ELECTRIC INC8 citations83
US7767594B2Aug 3, 2010
Semiconductor device producing method
HITACHI INT ELECTRIC INC9 citations83
US7662727B2Feb 16, 2010
Method for manufacturing semiconductor device background
HITACHI INT ELECTRIC INC2 citations62
US7892983B2Feb 22, 2011
Substrate processing apparatus and producing method of semiconductor device
HITACHI INT ELECTRIC INC1 citations52
US8641829B2Feb 4, 2014
Substrate processing system
HITACHI INT ELECTRIC INC1 citations49
MIYA HIRONOBU
4 patentsUS8227346B2Jul 24, 2012
Method of producing semiconductor device
MIYA HIRONOBU12 citations91
US8105957B2Jan 31, 2012
Method of producing semiconductor device
MIYA HIRONOBU7 citations83
US8481434B2Jul 9, 2013
Method of manufacturing a semiconductor device and processing apparatus
MIYA HIRONOBU6 citations70
US8058184B2Nov 15, 2011
Semiconductor device producing method
MIYA HIRONOBU0 citations51