Inventor

MCCAFFERTY DIANE CZOP

US3 patents

⚠️ This page may combine multiple inventors who share the name “MCCAFFERTY DIANE CZOP”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEENDERS MARTINUS HENDRIKUS ANTONIUS

1 patent

US9632425B2Apr 25, 2017

Lithographic apparatus, a dryer and a method of removing liquid from a surface

LEENDERS MARTINUS HENDRIKUS ANTONIUS2 citations71

SEWELL HARRY

1 patent

US8736807B2May 27, 2014

Systems and methods for thermally-induced aberration correction in immersion lithography

SEWELL HARRY0 citations48

ASML HOLDING NV

1 patent

US7995185B2Aug 9, 2011

Systems and methods for thermally-induced aberration correction in immersion lithography

ASML HOLDING NV1 citations48