Inventor
STEIGER THOMAS D
US16 patents
⚠️ This page may combine multiple inventors who share the name “STEIGER THOMAS D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
12 patentsUS7006547B2Feb 28, 2006
Very high repetition rate narrow band gas discharge laser system
CYMER INC27 citations92
US6882674B2Apr 19, 2005
Four KHz gas discharge laser system
CYMER INC31 citations90
US6690706B2Feb 10, 2004
High rep-rate laser with improved electrodes
CYMER INC17 citations83
US7522650B2Apr 21, 2009
Gas discharge laser chamber improvements
CYMER INC8 citations82
US7542502B2Jun 2, 2009
Thermal-expansion tolerant, preionizer electrode for a gas discharge laser
CYMER INC7 citations73
US7369596B2May 6, 2008
Chamber for a high energy excimer laser source
CYMER INC8 citations73
US7535948B2May 19, 2009
Cathodes for fluorine gas discharge lasers
CYMER INC7 citations72
US6937635B2Aug 30, 2005
High rep-rate laser with improved electrodes
CYMER INC7 citations71
US7633989B2Dec 15, 2009
High pulse repetition rate gas discharge laser
CYMER INC2 citations63
US7301980B2Nov 27, 2007
Halogen gas discharge laser electrodes
CYMER INC5 citations61
US7132123B2Nov 7, 2006
High rep-rate laser with improved electrodes
CYMER INC3 citations60
US7230965B2Jun 12, 2007
Anodes for fluorine gas discharge lasers
CYMER INC1 citations52