Inventor
LO TZU-CHUN
TW7 patents
⚠️ This page may combine multiple inventors who share the name “LO TZU-CHUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS9184101B2Nov 10, 2015
Method for removing semiconductor fins using alternating masks
TAIWAN SEMICONDUCTOR MFG CO LTD10 citations81
US9437485B2Sep 6, 2016
Method for line stress reduction through dummy shoulder structures
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9748107B2Aug 29, 2017
Method for removing semiconductor fins using alternating masks
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations49
US9697325B2Jul 4, 2017
System and method for optimization of an imaged pattern of a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48