Inventor
DIER OLIVER
DE9 patents
Patents
9 patentsUS10161808B2Dec 25, 2018
Method and arrangement for determining the heating condition of a mirror in an optical system
ZEISS CARL SMT GMBH3 citations71
US9442383B2Sep 13, 2016
EUV-mirror arrangement, optical system with EUV-mirror arrangement and associated operating method
ZEISS CARL SMT GMBH3 citations69
US10331048B2Jun 25, 2019
Mirror, in particular for a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH1 citations59
US10203435B2Feb 12, 2019
EUV mirror and optical system comprising EUV mirror
ZEISS CARL SMT GMBH1 citations59
US9997268B2Jun 12, 2018
EUV-mirror, optical system with EUV-mirror and associated operating method
ZEISS CARL SMT GMBH1 citations48
US11328831B2May 10, 2022
Method for treating a reflective optical element for the EUV wavelength range, method for producing same, and treating apparatus
ZEISS CARL SMT GMBH0 citations47
US9921483B2Mar 20, 2018
Surface correction of mirrors with decoupling coating
ZEISS CARL SMT GMBH1 citations46
US10520827B2Dec 31, 2019
Optical system, in particular for a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations38
US9915873B2Mar 13, 2018
Reflective optical element, and optical system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations36