Inventor
WINTER RALF
DE8 patents
⚠️ This page may combine multiple inventors who share the name “WINTER RALF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
7 patentsUS10509336B2Dec 17, 2019
Optical assembly having a thermally conductive component
ZEISS CARL SMT GMBH2 citations70
US11194119B2Dec 7, 2021
Optical assembly having a thermally conductive component
ZEISS CARL SMT GMBH0 citations60
US11099484B2Aug 24, 2021
Method for repairing reflective optical elements for EUV lithography
ZEISS CARL SMT GMBH0 citations59
US10649340B2May 12, 2020
Reflective optical element for EUV lithography
ZEISS CARL SMT GMBH1 citations59
US10203435B2Feb 12, 2019
EUV mirror and optical system comprising EUV mirror
ZEISS CARL SMT GMBH1 citations59
US11328831B2May 10, 2022
Method for treating a reflective optical element for the EUV wavelength range, method for producing same, and treating apparatus
ZEISS CARL SMT GMBH0 citations47
US9915873B2Mar 13, 2018
Reflective optical element, and optical system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations36