Inventor
STROBEL SEBASTIAN
DE5 patents
Patents
5 patentsUS10423073B2Sep 24, 2019
Method for producing a mirror element
ZEISS CARL SMT GMBH5 citations71
US10203435B2Feb 12, 2019
EUV mirror and optical system comprising EUV mirror
ZEISS CARL SMT GMBH1 citations59
US12406777B2Sep 2, 2025
Optical element for a EUV projection exposure system
ZEISS CARL SMT GMBH0 citations54
US11328831B2May 10, 2022
Method for treating a reflective optical element for the EUV wavelength range, method for producing same, and treating apparatus
ZEISS CARL SMT GMBH0 citations47
US9915873B2Mar 13, 2018
Reflective optical element, and optical system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations36