Inventor
RECK THEODORE
US4 patents
Patents
4 patentsUS10100858B2Oct 16, 2018
Wafer-to-wafer alignment method
CALIFORNIA INST OF TECHN4 citations69
US9791321B2Oct 17, 2017
340 GHz multipixel transceiver
CALIFORNIA INST OF TECHN6 citations68
US9512863B2Dec 6, 2016
Silicon alignment pins: an easy way to realize a wafer-to-wafer alignment
CALIFORNIA INST OF TECHN0 citations48
US9461352B2Oct 4, 2016
Multi-step deep reactive ion etching fabrication process for silicon-based terahertz components
CALIFORNIA INST OF TECHN0 citations36