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Inventor
SILES JOSE V
US
2 patents
Patents
2 patents
US10100858B2
Oct 16, 2018
Wafer-to-wafer alignment method
CALIFORNIA INST OF TECHN
4 citations
69
US9512863B2
Dec 6, 2016
Silicon alignment pins: an easy way to realize a wafer-to-wafer alignment
CALIFORNIA INST OF TECHN
0 citations
48