Inventor
SIN GARRETT HO YEE
US11 patents
⚠️ This page may combine multiple inventors who share the name “SIN GARRETT HO YEE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS10493590B2Dec 3, 2019
Selection of polishing parameters to generate removal or pressure profile
APPLIED MATERIALS INC8 citations82
US9213340B2Dec 15, 2015
Selection of polishing parameters to generate removal or pressure profile
APPLIED MATERIALS INC11 citations82
US11853042B2Dec 26, 2023
Part, sensor, and metrology data integration
APPLIED MATERIALS INC2 citations68
US11241769B2Feb 8, 2022
Methods and apparatus for profile and surface preparation of retaining rings utilized in chemical mechanical polishing processes
APPLIED MATERIALS INC0 citations58
US11157661B2Oct 26, 2021
Process development visualization tool
APPLIED MATERIALS INC0 citations49
US10252397B2Apr 9, 2019
Methods and apparatus for profile and surface preparation of retaining rings utilized in chemical mechanical polishing processes
APPLIED MATERIALS INC0 citations48
US10610994B2Apr 7, 2020
Polishing system with local area rate control and oscillation mode
APPLIED MATERIALS INC0 citations41
US10434623B2Oct 8, 2019
Local area polishing system and polishing pad assemblies for a polishing system
APPLIED MATERIALS INC0 citations41
US9873179B2Jan 23, 2018
Carrier for small pad for chemical mechanical polishing
APPLIED MATERIALS INC0 citations41