Inventor
MUZQUIZ JULIO DAVID
US2 patents
Patents
2 patentsUS11241769B2Feb 8, 2022
Methods and apparatus for profile and surface preparation of retaining rings utilized in chemical mechanical polishing processes
APPLIED MATERIALS INC0 citations58
US10252397B2Apr 9, 2019
Methods and apparatus for profile and surface preparation of retaining rings utilized in chemical mechanical polishing processes
APPLIED MATERIALS INC0 citations48