Inventor
SHIRASAKI YASUHIRO
JP19 patents
⚠️ This page may combine multiple inventors who share the name “SHIRASAKI YASUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
9 patentsUS11355308B2Jun 7, 2022
Charged particle beam device
HITACHI HIGH TECH CORP2 citations72
US11177108B2Nov 16, 2021
Charged particle beam application apparatus
HITACHI HIGH TECH CORP4 citations71
US12125667B2Oct 22, 2024
Charged particle beam device
HITACHI HIGH TECH CORP0 citations62
US11631568B2Apr 18, 2023
Device defect detection method using a charged particle beam
HITACHI HIGH TECH CORP0 citations62
US11328897B2May 10, 2022
Charged particle beam device
HITACHI HIGH TECH CORP1 citations61
US11915903B2Feb 27, 2024
Electron beam application apparatus
HITACHI HIGH TECH CORP0 citations52
US12406826B2Sep 2, 2025
Charged particle beam device and sample observation method
HITACHI HIGH TECH CORP0 citations51
US12196802B2Jan 14, 2025
Semiconductor inspection device and method for inspecting semiconductor sample
HITACHI HIGH TECH CORP0 citations51
US12573586B2Mar 10, 2026
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations48
HITACHI LTD
8 patentsUS10755396B2Aug 25, 2020
Image forming apparatus
HITACHI LTD1 citations62
US10256068B2Apr 9, 2019
Charged particle beam apparatus
HITACHI LTD0 citations51
US10361063B2Jul 23, 2019
Charged particle detector and charged particle beam device using the same
HITACHI LTD0 citations50
US11380518B2Jul 5, 2022
Measurement system and method for setting observation conditions of measurement apparatus
HITACHI LTD0 citations47
US11334761B2May 17, 2022
Information processing system and information processing method
HITACHI LTD0 citations46
US10483083B2Nov 19, 2019
Scanning electron microscope and image processing apparatus
HITACHI LTD0 citations46
US10651004B2May 12, 2020
Charged particle beam device
HITACHI LTD0 citations41
US9991088B2Jun 5, 2018
Charged particle beam device and aberration corrector
HITACHI LTD0 citations41