Inventor
HEUNG KING YI
US7 patents
⚠️ This page may combine multiple inventors who share the name “HEUNG KING YI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS10493590B2Dec 3, 2019
Selection of polishing parameters to generate removal or pressure profile
APPLIED MATERIALS INC8 citations82
US9213340B2Dec 15, 2015
Selection of polishing parameters to generate removal or pressure profile
APPLIED MATERIALS INC11 citations82
US10589399B2Mar 17, 2020
Textured small pad for chemical mechanical polishing
APPLIED MATERIALS INC3 citations71
US10256111B2Apr 9, 2019
Chemical mechanical polishing automated recipe generation
APPLIED MATERIALS INC3 citations69
US10610994B2Apr 7, 2020
Polishing system with local area rate control and oscillation mode
APPLIED MATERIALS INC0 citations41
US10434623B2Oct 8, 2019
Local area polishing system and polishing pad assemblies for a polishing system
APPLIED MATERIALS INC0 citations41