Inventor
Arceo de la Pena Abraham
US10 patents
Patents
10 patentsUS9941142B1Apr 10, 2018
Tunable TiOxNy hardmask for multilayer patterning
IBM3 citations72
US9799534B1Oct 24, 2017
Application of titanium-oxide as a patterning hardmask
IBM2 citations71
US10249512B2Apr 2, 2019
Tunable TiOxNy hardmask for multilayer patterning
IBM1 citations62
US11543751B2Jan 3, 2023
Organic photoresist adhesion to metal oxide hardmasks
IBM0 citations61
US10950440B2Mar 16, 2021
Patterning directly on an amorphous silicon hardmask
IBM0 citations61
US10366879B2Jul 30, 2019
Dry and wet etch resistance for atomic layer deposited TiO2 for SIT spacer application
IBM1 citations61
US11935931B2Mar 19, 2024
Selective shrink for contact trench
IBM0 citations51
US11373880B2Jun 28, 2022
Creating different width lines and spaces in a metal layer
IBM0 citations51
US10975464B2Apr 13, 2021
Hard mask films with graded vertical concentration formed using reactive sputtering in a radio frequency deposition chamber
IBM0 citations51
US10755926B2Aug 25, 2020
Patterning directly on an amorphous silicon hardmask
IBM0 citations51