Inventor
CHOI SANG-BONG
KR9 patents
⚠️ This page may combine multiple inventors who share the name “CHOI SANG-BONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
8 patentsUS6440760B1Aug 27, 2002
Method of measuring etched state of semiconductor wafer using optical impedence measurement
SAMSUNG ELECTRONICS CO LTD67 citations92
US6528333B1Mar 4, 2003
Method of and device for detecting micro-scratches
SAMSUNG ELECTRONICS CO LTD28 citations91
US6449037B2Sep 10, 2002
Method of and device for detecting micro-scratches
SAMSUNG ELECTRONICS CO LTD19 citations91
US6366688B1Apr 2, 2002
Apparatus and method for contact failure inspection in semiconductor devices
SAMSUNG ELECTRONICS CO LTD53 citations91
US5692954ADec 2, 1997
Air-shower system for a clean room
SAMSUNG ELECTRONICS CO LTD43 citations86
US6515293B1Feb 4, 2003
Method and apparatus for detecting thickness of thin layer formed on a wafer
SAMSUNG ELECTRONICS CO LTD9 citations72
US7027638B2Apr 11, 2006
Wafer color variation correcting method, selective wafer defect detecting method, and computer readable recording media for the same
SAMSUNG ELECTRONICS CO LTD4 citations60
US6870948B2Mar 22, 2005
Method and apparatus for numerically analyzing grain growth on semiconductor wafer using SEM image
SAMSUNG ELECTRONICS CO LTD1 citations51