Inventor
HYUN PIL-SIK
KR6 patents
Patents
6 patentsUS6544802B1Apr 8, 2003
Wafer inspection system and method for selectively inspecting conductive pattern defects
SAMSUNG ELECTRONICS CO LTD20 citations91
US6528333B1Mar 4, 2003
Method of and device for detecting micro-scratches
SAMSUNG ELECTRONICS CO LTD28 citations91
US6449037B2Sep 10, 2002
Method of and device for detecting micro-scratches
SAMSUNG ELECTRONICS CO LTD19 citations91
US6912056B2Jun 28, 2005
Apparatus and method for measuring each thickness of a multilayer stacked on a substrate
SAMSUNG ELECTRONICS CO LTD19 citations81
US6515293B1Feb 4, 2003
Method and apparatus for detecting thickness of thin layer formed on a wafer
SAMSUNG ELECTRONICS CO LTD9 citations72
US7405817B2Jul 29, 2008
Method and apparatus for classifying defects of an object
SAMSUNG ELECTRONICS CO LTD2 citations62