Inventor
O'CARROLL CONOR PATRICK
US7 patents
⚠️ This page may combine multiple inventors who share the name “O'CARROLL CONOR PATRICK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATTSON TECH INC
6 patentsUS6717158B1Apr 6, 2004
Heating device for heating semiconductor wafers in thermal processing chambers
MATTSON TECH INC74 citations95
US6559424B2May 6, 2003
Windows used in thermal processing chambers
MATTSON TECH INC82 citations95
US7269343B2Sep 11, 2007
Heating configuration for use in thermal processing chambers
MATTSON TECH INC37 citations94
US6970644B2Nov 29, 2005
Heating configuration for use in thermal processing chambers
MATTSON TECH INC52 citations94
US7949237B2May 24, 2011
Heating configuration for use in thermal processing chambers
MATTSON TECH INC17 citations90
US7977258B2Jul 12, 2011
Method and system for thermally processing a plurality of wafer-shaped objects
MATTSON TECH INC11 citations80