Inventor
TAOKA JAMES TSUNEO
US5 patents
Patents
5 patentsUS6559424B2May 6, 2003
Windows used in thermal processing chambers
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US7269343B2Sep 11, 2007
Heating configuration for use in thermal processing chambers
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Heating configuration for use in thermal processing chambers
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US7949237B2May 24, 2011
Heating configuration for use in thermal processing chambers
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US6770146B2Aug 3, 2004
Method and system for rotating a semiconductor wafer in processing chambers
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