Inventor
KOREN ZION
US6 patents
Patents
6 patentsUS6717158B1Apr 6, 2004
Heating device for heating semiconductor wafers in thermal processing chambers
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US6559424B2May 6, 2003
Windows used in thermal processing chambers
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US7269343B2Sep 11, 2007
Heating configuration for use in thermal processing chambers
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US6970644B2Nov 29, 2005
Heating configuration for use in thermal processing chambers
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US7949237B2May 24, 2011
Heating configuration for use in thermal processing chambers
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US6770146B2Aug 3, 2004
Method and system for rotating a semiconductor wafer in processing chambers
MATTSON TECH INC48 citations86