Inventor
YOUNG ROBERT M
US15 patents
⚠️ This page may combine multiple inventors who share the name “YOUNG ROBERT M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NORTHROP GRUMMAN CORP
5 patentsUS5659171AAug 19, 1997
Micro-miniature diaphragm pump for the low pressure pumping of gases
NORTHROP GRUMMAN CORP299 citations98
US5536939AJul 16, 1996
Miniaturized mass filter
NORTHROP GRUMMAN CORP149 citations98
US5871336AFeb 16, 1999
Thermal transpiration driven vacuum pump
NORTHROP GRUMMAN CORP63 citations95
US5747815AMay 5, 1998
Micro-miniature ionizer for gas sensor applications and method of making micro-miniature ionizer
NORTHROP GRUMMAN CORP48 citations92
US7102472B1Sep 5, 2006
MEMS device
NORTHROP GRUMMAN CORP36 citations86
NORTHROP GRUMMAN SYSTEMS CORP
4 patentsUS12426504B2Sep 23, 2025
Solid-state cooler device with grid point contacts
NORTHROP GRUMMAN SYSTEMS CORP0 citations61
US12150316B2Nov 19, 2024
Method to integrate DC and RF phase change switches into high-speed SiGe BiCMOS
NORTHROP GRUMMAN SYSTEMS CORP0 citations55
US11522010B2Dec 6, 2022
Method to integrate DC and RF phase change switches into high-speed SiGe BiCMOS
NORTHROP GRUMMAN SYSTEMS CORP0 citations55
US8018053B2Sep 13, 2011
Heat transfer device
NORTHROP GRUMMAN SYSTEMS CORP1 citations50
WESTINGHOUSE ELECTRIC CORP
3 patentsUS5466932ANov 14, 1995
Micro-miniature piezoelectric diaphragm pump for the low pressure pumping of gases
WESTINGHOUSE ELECTRIC CORP55 citations96
US5386115AJan 31, 1995
Solid state micro-machined mass spectrograph universal gas detection sensor
WESTINGHOUSE ELECTRIC CORP96 citations96
US5492867AFeb 20, 1996
Method for manufacturing a miniaturized solid state mass spectrograph
WESTINGHOUSE ELECTRIC CORP62 citations94