Inventor
UEYAMA SUMIYOSHI
JP5 patents
Patents
5 patentsUS5993538ANov 30, 1999
Method of forming single-crystalline thin film using beam irradiating method
NEURALSYSTEMS CORP25 citations91
US5776253AJul 7, 1998
Apparatus for forming single-crystalline thin film by beam irradiator and beam reflecting device
NEURALSYSTEMS CORP19 citations91
US6032611AMar 7, 2000
Apparatus for forming single-crystalline thin film by beam irradiator and beam reflecting device
NEURALSYSTEMS CORP12 citations80
US5795385AAug 18, 1998
Method of forming single-crystalline thin film by beam irradiator
NEURALSYSTEMS CORP8 citations72
US5814150ASep 29, 1998
Method of and apparatus for forming single-crystalline thin film, beam irradiator, beam irradiating method and beam reflecting device
NEURALSYSTEMS CORP3 citations61