Inventor

KOENIGSMANN HOLGER

US2 patents

Patents

2 patents

US6478902B2Nov 12, 2002

Fabrication and bonding of copper sputter targets

PRAXAIR TECHNOLOGY INC43 citations89

US6176944B1Jan 23, 2001

Method of making low magnetic permeability cobalt sputter targets

PRAXAIR TECHNOLOGY INC31 citations88