Inventor
KOBARI TOSHIAKI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “KOBARI TOSHIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
12 patentsUS5820320AOct 13, 1998
Apparatus for treating the inner surface of vacuum chamber
HITACHI LTD124 citations96
US5626682AMay 6, 1997
Process and apparatus for treating inner surface treatment of chamber and vacuum chamber
HITACHI LTD145 citations96
US5442183AAug 15, 1995
Charged particle beam apparatus including means for maintaining a vacuum seal
HITACHI LTD47 citations95
US5036290AJul 30, 1991
Synchrotron radiation generation apparatus
HITACHI LTD53 citations94
US6665139B2Dec 16, 2003
Magnetic-disc unit with gap between disc and shroud
HITACHI LTD23 citations92
US6600626B2Jul 29, 2003
Magnetic disk apparatus
HITACHI LTD19 citations92
US6369978B1Apr 9, 2002
Magnetic disk apparatus with shroud having opening downstream of moveable arm
HITACHI LTD49 citations92
US5254856AOct 19, 1993
Charged particle beam apparatus having particular electrostatic objective lens and vacuum pump systems
HITACHI LTD43 citations92
US4664062AMay 12, 1987
Apparatus for manufacturing semiconductors
HITACHI LTD40 citations92
US6031235AFeb 29, 2000
Ultra-high vacuum apparatus
HITACHI LTD11 citations69
US6898049B2May 24, 2005
Magnetic disk apparatus with air flow bypass channel
HITACHI LTD4 citations62
US4853640AAug 1, 1989
Synchrotron radiation source
HITACHI LTD5 citations60