Inventor
FUERTER GERD
DE9 patents
⚠️ This page may combine multiple inventors who share the name “FUERTER GERD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS STIFTUNG
8 patentsUS6600608B1Jul 29, 2003
Catadioptric objective comprising two intermediate images
ZEISS STIFTUNG129 citations98
US5742436AApr 21, 1998
Maximum aperture catadioptric reduction objective for microlithography
ZEISS STIFTUNG100 citations96
US5880891AMar 9, 1999
High-resolution high-apertured objective
ZEISS STIFTUNG55 citations95
US5402267AMar 28, 1995
Catadioptric reduction objective
ZEISS STIFTUNG88 citations95
US6512573B2Jan 28, 2003
Projection exposure apparatus and exposure method
ZEISS STIFTUNG45 citations91
US5982558ANov 9, 1999
REMA objective for microlithographic projection exposure systems
ZEISS STIFTUNG45 citations91
US6590718B2Jul 8, 2003
Projection exposure system having a reflective reticle
ZEISS STIFTUNG42 citations89
US5289316AFeb 22, 1994
Measuring objective
ZEISS STIFTUNG5 citations61