Inventor
SMITH JONATHAN B
US8 patents
⚠️ This page may combine multiple inventors who share the name “SMITH JONATHAN B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED MICRO DEVICES INC
7 patentsUS6261963B1Jul 17, 2001
Reverse electroplating of barrier metal layer to improve electromigration performance in copper interconnect devices
ADVANCED MICRO DEVICES INC62 citations95
US6500755B2Dec 31, 2002
Resist trim process to define small openings in dielectric layers
ADVANCED MICRO DEVICES INC18 citations91
US6514844B1Feb 4, 2003
Sidewall treatment for low dielectric constant (low K) materials by ion implantation
ADVANCED MICRO DEVICES INC21 citations90
US6294472B1Sep 25, 2001
Dual slurry particle sizes for reducing microscratching of wafers
ADVANCED MICRO DEVICES INC15 citations83
US6315637B1Nov 13, 2001
Photoresist removal using a polishing tool
ADVANCED MICRO DEVICES INC11 citations73
US6406993B1Jun 18, 2002
Method of defining small openings in dielectric layers
ADVANCED MICRO DEVICES INC7 citations72
US5985364ANov 16, 1999
Method of exhaust control for spin-on films with reduced defects
ADVANCED MICRO DEVICES INC15 citations70