Inventor
LE HIENMINH HUU
US9 patents
⚠️ This page may combine multiple inventors who share the name “LE HIENMINH HUU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS7815782B2Oct 19, 2010
PVD target
APPLIED MATERIALS INC17 citations84
US7432184B2Oct 7, 2008
Integrated PVD system using designated PVD chambers
APPLIED MATERIALS INC18 citations84
US7566900B2Jul 28, 2009
Integrated metrology tools for monitoring and controlling large area substrate processing chambers
APPLIED MATERIALS INC6 citations62