Inventor
YATSUGAKE YASUO
JP9 patents
⚠️ This page may combine multiple inventors who share the name “YATSUGAKE YASUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
4 patentsUS4685802AAug 11, 1987
Small particle detection system
HITACHI LTD32 citations92
US7417244B2Aug 26, 2008
Surface inspection apparatus and method thereof
HITACHI LTD9 citations83
US7952085B2May 31, 2011
Surface inspection apparatus and method thereof
HITACHI LTD6 citations73
US4464011AAug 7, 1984
Light beam scanning apparatus and the method
HITACHI LTD6 citations60