Inventor
PHILLIPS ALTON H
US27 patents
⚠️ This page may combine multiple inventors who share the name “PHILLIPS ALTON H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
16 patentsUS7591561B2Sep 22, 2009
Liquid cooled mirror for use in extreme ultraviolet lithography
NIKON CORP22 citations92
US7477358B2Jan 13, 2009
EUV reticle handling system and method
NIKON CORP16 citations92
US7095482B2Aug 22, 2006
Multiple system vibration isolator
NIKON CORP20 citations92
US6953109B2Oct 11, 2005
Vibration isolator with low lateral stiffness
NIKON CORP22 citations92
US6922293B2Jul 26, 2005
Kinematic optical mounting assembly with flexures
NIKON CORP28 citations92
US6880942B2Apr 19, 2005
Adaptive optic with discrete actuators for continuous deformation of a deformable mirror system
NIKON CORP28 citations92
US6774981B1Aug 10, 2004
Modular exposure apparatus with removable optical device and improved isolation of the optical device
NIKON CORP24 citations92
US6987559B2Jan 17, 2006
Vibration-attenuation devices having low lateral stiffness, and exposure apparatus comprising same
NIKON CORP14 citations84
US7804583B2Sep 28, 2010
EUV reticle handling system and method
NIKON CORP6 citations74
US7728462B2Jun 1, 2010
Monolithic stage devices providing motion in six degrees of freedom
NIKON CORP6 citations63
US7773198B2Aug 10, 2010
Filtered device container assembly with shield for a reticle
NIKON CORP2 citations62
US7551265B2Jun 23, 2009
Contact material and system for ultra-clean applications
NIKON CORP6 citations62
US10121760B2Nov 6, 2018
Wafer bonding system and method
NIKON CORP1 citations52
US8002420B2Aug 23, 2011
Hydrostatic liquid-metal deformable optical elements
NIKON CORP0 citations52
US9947637B2Apr 17, 2018
System and method for clamping wafers together in alignment using pressure
NIKON CORP0 citations48
US7283201B2Oct 16, 2007
Devices and methods for sensing secure attachment of an object onto a chuck
NIKON CORP0 citations41
PHILLIPS ALTON H
8 patentsUS8284379B2Oct 9, 2012
Devices and methods for reducing residual reticle chucking forces
PHILLIPS ALTON H10 citations83
US8794011B2Aug 5, 2014
Method and apparatus for utilizing in-situ measurements techniques in conjunction with thermoelectric chips (TECs)
PHILLIPS ALTON H2 citations62
US9323157B2Apr 26, 2016
Mirror assembly for an exposure apparatus
PHILLIPS ALTON H0 citations51
US9041900B2May 26, 2015
High heat load optics with a liquid metal interface for use in an extreme ultraviolet lithography system
PHILLIPS ALTON H0 citations51
US9041904B2May 26, 2015
High heat load optics with a liquid metal interface for use in an extreme ultraviolet lithography system
PHILLIPS ALTON H0 citations51
US8739383B2Jun 3, 2014
Method and apparatus for aligning mirror blocks of a multi-element mirror assembly
PHILLIPS ALTON H1 citations51
US10114193B2Oct 30, 2018
Fly's eye optical mirror with a plurality of optical elements rotationally aligned along two axes
PHILLIPS ALTON H0 citations41
US9304385B2Apr 5, 2016
Exposure method and device manufacturing method including selective deformation of a mask
PHILLIPS ALTON H0 citations38