Inventor
VAN DE VIN CORNELIS HENRICUS
NL2 patents
Patents
2 patentsUS7746484B2Jun 29, 2010
Method for positioning a target portion of a substrate with respect to a focal plane of a projection system
ASML NETHERLANDS BV7 citations68
US7889357B2Feb 15, 2011
Method for positioning a target portion of a substrate with respect to a focal plane of a projection system
ASML NETHERLANDS BV2 citations57