Inventor

MINNAERT ARTHUR WINFRIED EDUARDUS

NL4 patents

⚠️ This page may combine multiple inventors who share the name “MINNAERT ARTHUR WINFRIED EDUARDUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents

US9606445B2Mar 28, 2017

Lithographic apparatus and method of manufacturing a device

ASML NETHERLANDS BV5 citations68

US7746484B2Jun 29, 2010

Method for positioning a target portion of a substrate with respect to a focal plane of a projection system

ASML NETHERLANDS BV7 citations68

US7889357B2Feb 15, 2011

Method for positioning a target portion of a substrate with respect to a focal plane of a projection system

ASML NETHERLANDS BV2 citations57

ASML HOLDING NV

1 patent

US12174552B2Dec 24, 2024

Lithographic apparatus and electrostatic clamp designs

ASML HOLDING NV0 citations58