Inventor
VAN ZON ALEX
NL5 patents
⚠️ This page may combine multiple inventors who share the name “VAN ZON ALEX”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
4 patentsUS7012672B2Mar 14, 2006
Lithographic apparatus, system, method, computer program, and apparatus for height map analysis
ASML NETHERLANDS BV20 citations84
US7746484B2Jun 29, 2010
Method for positioning a target portion of a substrate with respect to a focal plane of a projection system
ASML NETHERLANDS BV7 citations68
US7684011B2Mar 23, 2010
Calibration method for a lithographic apparatus
ASML NETHERLANDS BV2 citations58
US7889357B2Feb 15, 2011
Method for positioning a target portion of a substrate with respect to a focal plane of a projection system
ASML NETHERLANDS BV2 citations57