Inventor
TOKUDA NORIFUMI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “TOKUDA NORIFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
5 patentsUS7635892B2Dec 22, 2009
Semiconductor device
MITSUBISHI ELECTRIC CORP13 citations82
US7009239B2Mar 7, 2006
Vertical semiconductor device and manufacturing method thereof
MITSUBISHI ELECTRIC CORP9 citations71
US7629226B2Dec 8, 2009
Semiconductor device and manufacturing method thereof
MITSUBISHI ELECTRIC CORP0 citations50
US7504707B2Mar 17, 2009
Semiconductor device and manufacturing method thereof
MITSUBISHI ELECTRIC CORP1 citations50
US7994067B2Aug 9, 2011
Semiconductor manufacturing equipment with an open-topped cassette apparatus
MITSUBISHI ELECTRIC CORP0 citations37