Inventor
BABBS DANIEL A
US20 patents
⚠️ This page may combine multiple inventors who share the name “BABBS DANIEL A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MOLECULAR IMPRINTS INC
11 patentsUS7270533B2Sep 18, 2007
System for creating a turbulent flow of fluid between a mold and a substrate
MOLECULAR IMPRINTS INC38 citations95
US7798801B2Sep 21, 2010
Chucking system for nano-manufacturing
MOLECULAR IMPRINTS INC25 citations92
US7636999B2Dec 29, 2009
Method of retaining a substrate to a wafer chuck
MOLECULAR IMPRINTS INC49 citations92
US7635445B2Dec 22, 2009
Method of separating a mold from a solidified layer disposed on a substrate
MOLECULAR IMPRINTS INC33 citations92
US7224443B2May 29, 2007
Imprint lithography substrate processing tool for modulating shapes of substrates
MOLECULAR IMPRINTS INC26 citations92
US7630067B2Dec 8, 2009
Interferometric analysis method for the manufacture of nano-scale devices
MOLECULAR IMPRINTS INC18 citations91
US7531025B2May 12, 2009
Method of creating a turbulent flow of fluid between a mold and a substrate
MOLECULAR IMPRINTS INC20 citations91
US7292326B2Nov 6, 2007
Interferometric analysis for the manufacture of nano-scale devices
MOLECULAR IMPRINTS INC47 citations91
US8033815B2Oct 11, 2011
Chucking system for nano-manufacturing
MOLECULAR IMPRINTS INC7 citations84
US7880872B2Feb 1, 2011
Interferometric analysis method for the manufacture of nano-scale devices
MOLECULAR IMPRINTS INC8 citations82
US7665981B2Feb 23, 2010
System to transfer a template transfer body between a motion stage and a docking plate
MOLECULAR IMPRINTS INC9 citations82
PROGRESSIVE SYS TECH INC
5 patentsUS5785186AJul 28, 1998
Substrate housing and docking system
PROGRESSIVE SYS TECH INC55 citations95
US5823361AOct 20, 1998
Substrate support apparatus for a substrate housing
PROGRESSIVE SYS TECH INC17 citations92
US5853214ADec 29, 1998
Aligner for a substrate carrier
PROGRESSIVE SYS TECH INC87 citations91
US5664926ASep 9, 1997
Stage assembly for a substrate processing system
PROGRESSIVE SYS TECH INC20 citations87
US5834915ANov 10, 1998
Sustrate housing and docking system
PROGRESSIVE SYS TECH INC6 citations68