Inventor
MANN EKKEHARD
DE10 patents
⚠️ This page may combine multiple inventors who share the name “MANN EKKEHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HUETTINGER ELEKTRONIK GMBH
4 patentsUS7745955B2Jun 29, 2010
RF plasma supply device
HUETTINGER ELEKTRONIK GMBH56 citations95
US7321227B2Jan 22, 2008
Measuring electrical current flowing through a conductor
HUETTINGER ELEKTRONIK GMBH29 citations91
US7981306B2Jul 19, 2011
Supplying RF power to a plasma process
HUETTINGER ELEKTRONIK GMBH10 citations78
US8018243B2Sep 13, 2011
Measurement signal processing
HUETTINGER ELEKTRONIK GMBH6 citations67