Inventor
CHO MYUNGCHAN
KR2 patents
Patents
2 patentsUS9079304B2Jul 14, 2015
Transfer unit, method for controlling the transfer unit, and apparatus and method for treating substrate using the transfer unit
SEMES CO LTD2 citations55
US10199249B2Feb 5, 2019
Transfer unit, apparatus for treating substrate, and method for treating substrate
SEMES CO LTD0 citations35