P

Inventor

KIMURA REIKO

JP8 patents
⚠️ This page may combine multiple inventors who share the name “KIMURA REIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

JSR CORP

5 patents
US9170488B2Oct 27, 2015

Resist pattern-forming method, and radiation-sensitive resin composition

JSR CORP2 citations61
US9046765B2Jun 2, 2015

Resist pattern-forming method, resist pattern-forming radiation-sensitive resin composition, and resist film

JSR CORP2 citations61
US8795954B2Aug 5, 2014

Resist pattern-forming method, and radiation-sensitive resin composition

JSR CORP1 citations51
US8609321B2Dec 17, 2013

Radiation-sensitive resin composition, polymer and compound

JSR CORP0 citations51
US9164387B2Oct 20, 2015

Pattern-forming method, and radiation-sensitive resin composition

JSR CORP0 citations40

SEIKO INSTR INC

1 patent
US5682132AOct 28, 1997

Vibrating module

SEIKO INSTR INC130 citations93

KIMURA TORU

1 patent
US8609319B2Dec 17, 2013

Radiation-sensitive resin composition and resist film formed using the same

KIMURA TORU6 citations71

NAKAHARA KAZUO

1 patent
US8609318B2Dec 17, 2013

Radiation-sensitive resin composition, method for forming resist pattern and polymer

NAKAHARA KAZUO2 citations59