Inventor
KIKUCHI RIE
JP10 patents
⚠️ This page may combine multiple inventors who share the name “KIKUCHI RIE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU CHEMICAL CO
9 patentsUS9805943B2Oct 31, 2017
Polymer for resist under layer film composition, resist under layer film composition, and patterning process
SHINETSU CHEMICAL CO7 citations84
US10429739B2Oct 1, 2019
Compound for forming organic film, composition for forming organic film, method for forming organic film, and patterning process
SHINETSU CHEMICAL CO3 citations72
US9728420B2Aug 8, 2017
Organic film composition, process for forming organic film, patterning process, and compound
SHINETSU CHEMICAL CO5 citations72
US9312127B2Apr 12, 2016
Method for producing semiconductor apparatus substrate
SHINETSU CHEMICAL CO4 citations72
US9984891B2May 29, 2018
Method for forming organic film and method for manufacturing substrate for semiconductor apparatus
SHINETSU CHEMICAL CO0 citations51
US9902875B2Feb 27, 2018
Composition for forming a coating type BPSG film, substrate, and patterning process
SHINETSU CHEMICAL CO1 citations51
US9580623B2Feb 28, 2017
Patterning process using a boron phosphorus silicon glass film
SHINETSU CHEMICAL CO1 citations49
US10620537B2Apr 14, 2020
Resist underlayer film composition, patterning process, method for forming resist underlayer film, and compound for resist underlayer film composition
SHINETSU CHEMICAL CO0 citations41
US9880470B2Jan 30, 2018
Composition for forming a coating type silicon-containing film, substrate, and patterning process
SHINETSU CHEMICAL CO0 citations41