Inventor

SJMAENOK LEONID AIZIKOVITCH

NL8 patents

⚠️ This page may combine multiple inventors who share the name “SJMAENOK LEONID AIZIKOVITCH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SJMAENOK LEONID AIZIKOVITCH

2 patents

US9897930B2Feb 20, 2018

Optical element comprising oriented carbon nanotube sheet and lithographic apparatus comprising such optical element

SJMAENOK LEONID AIZIKOVITCH14 citations81

USRE43036EDec 20, 2011

Filter for extreme ultraviolet lithography

SJMAENOK LEONID AIZIKOVITCH1 citations57

ASML NETHERLANDS BV

2 patents

US7612353B2Nov 3, 2009

Lithographic apparatus, contaminant trap, and device manufacturing method

ASML NETHERLANDS BV8 citations79

US7397056B2Jul 8, 2008

Lithographic apparatus, contaminant trap, and device manufacturing method

ASML NETHERLANDS BV7 citations67

YAKUNIN ANDREI MIKHAILOVICH

2 patents

US9529283B2Dec 27, 2016

Radiation source, lithographic apparatus, and device manufacturing method

YAKUNIN ANDREI MIKHAILOVICH2 citations61

US9448492B2Sep 20, 2016

Multilayer mirror, method of producing a multilayer mirror and lithographic apparatus

YAKUNIN ANDREI MIKHAILOVICH2 citations55

BANINE VADIM YEVGENYEVICH

1 patent

US9285690B2Mar 15, 2016

Mirror, lithographic apparatus and device manufacturing method

BANINE VADIM YEVGENYEVICH1 citations51

GLUSHKOV DENIS ALEXANDROVICH

1 patent

US9082521B2Jul 14, 2015

EUV multilayer mirror with interlayer and lithographic apparatus using the mirror

GLUSHKOV DENIS ALEXANDROVICH1 citations40