Inventor

SIX STEPHAN

DE10 patents

⚠️ This page may combine multiple inventors who share the name “SIX STEPHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

4 patents

US9645513B2May 9, 2017

Optical imaging with reduced immersion liquid evaporation effects

ZEISS CARL SMT GMBH1 citations60

US10107943B2Oct 23, 2018

Optical imaging with reduced immersion liquid evaporation effects

ZEISS CARL SMT GMBH0 citations49

US11328831B2May 10, 2022

Method for treating a reflective optical element for the EUV wavelength range, method for producing same, and treating apparatus

ZEISS CARL SMT GMBH0 citations47

US11162778B2Nov 2, 2021

Method for determining material removal and device for the beam machining of a workpiece

ZEISS CARL SMT GMBH0 citations44

SIX STEPHAN

3 patents

US8279402B2Oct 2, 2012

Optical arrangement for immersion lithography with a hydrophobic coating, as well as projection exposure apparatus comprising the same

SIX STEPHAN11 citations76

US8934079B2Jan 13, 2015

Optical imaging with reduced immersion liquid evaporation effects

SIX STEPHAN2 citations59

US8564925B2Oct 22, 2013

Wafer chuck for EUV lithography

SIX STEPHAN3 citations59

ZEISS CARL SMT AG

1 patent

US7738187B2Jun 15, 2010

Optical element, projection lens and associated projection exposure apparatus

ZEISS CARL SMT AG48 citations91

SMSDEMAG AG

1 patent

US8007711B2Aug 30, 2011

Method for operating a converter

SMSDEMAG AG1 citations38

KAMENOV VLADIMIR

1 patent

US9733395B2Aug 15, 2017

Microlithographic projection exposure apparatus

KAMENOV VLADIMIR0 citations34