Inventor
TAATJES STEVEN W
US6 patents
⚠️ This page may combine multiple inventors who share the name “TAATJES STEVEN W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
4 patentsUS6099702AAug 8, 2000
Electroplating chamber with rotatable wafer holder and pre-wetting and rinsing capability
NOVELLUS SYSTEMS INC203 citations98
US6214193B1Apr 10, 2001
Electroplating process including pre-wetting and rinsing
NOVELLUS SYSTEMS INC48 citations96
US6716334B1Apr 6, 2004
Electroplating process chamber and method with pre-wetting and rinsing capability
NOVELLUS SYSTEMS INC30 citations92
US6167893B1Jan 2, 2001
Dynamic chuck for semiconductor wafer or other substrate
NOVELLUS SYSTEMS INC113 citations92