P

Inventor

CONTOLINI ROBERT J

US26 patents
⚠️ This page may combine multiple inventors who share the name “CONTOLINI ROBERT J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

14 patents
US6315883B1Nov 13, 2001

Electroplanarization of large and small damascene features using diffusion barriers and electropolishing

NOVELLUS SYSTEMS INC112 citations98
US6193859B1Feb 27, 2001

Electric potential shaping apparatus for holding a semiconductor wafer during electroplating

NOVELLUS SYSTEMS INC159 citations98
US6162344ADec 19, 2000

Method of electroplating semiconductor wafer using variable currents and mass transfer to obtain uniform plated layer

NOVELLUS SYSTEMS INC179 citations98
US6159354ADec 12, 2000

Electric potential shaping method for electroplating

NOVELLUS SYSTEMS INC182 citations98
US6126798AOct 3, 2000

Electroplating anode including membrane partition system and method of preventing passivation of same

NOVELLUS SYSTEMS INC259 citations98
US6110346AAug 29, 2000

Method of electroplating semicoductor wafer using variable currents and mass transfer to obtain uniform plated layer

NOVELLUS SYSTEMS INC158 citations98
US6099702AAug 8, 2000

Electroplating chamber with rotatable wafer holder and pre-wetting and rinsing capability

NOVELLUS SYSTEMS INC203 citations98
US6074544AJun 13, 2000

Method of electroplating semiconductor wafer using variable currents and mass transfer to obtain uniform plated layer

NOVELLUS SYSTEMS INC288 citations98
US7070686B2Jul 4, 2006

Dynamically variable field shaping element

NOVELLUS SYSTEMS INC76 citations97
US6569299B1May 27, 2003

Membrane partition system for plating of wafers

NOVELLUS SYSTEMS INC101 citations97
US6214193B1Apr 10, 2001

Electroplating process including pre-wetting and rinsing

NOVELLUS SYSTEMS INC48 citations96
US6716334B1Apr 6, 2004

Electroplating process chamber and method with pre-wetting and rinsing capability

NOVELLUS SYSTEMS INC30 citations92
US6709565B2Mar 23, 2004

Method and apparatus for uniform electropolishing of damascene ic structures by selective agitation

NOVELLUS SYSTEMS INC42 citations92
US6514393B1Feb 4, 2003

Adjustable flange for plating and electropolishing thickness profile control

NOVELLUS SYSTEMS INC27 citations91

UNIV CALIFORNIA

8 patents

US ARMY

2 patents

US ENERGY

2 patents