Inventor
NAITOU RYOUICHIROU
JP9 patents
Patents
9 patentsUS9162163B2Oct 20, 2015
Processing liquid supply method, processing liquid supply apparatus and storage medium
TOKYO ELECTRON LTD4 citations71
US11664249B2May 30, 2023
Substrate processing apparatus, substrate processing method, and recording medium
TOKYO ELECTRON LTD2 citations66
US7419773B2Sep 2, 2008
Rinsing method and developing method
TOKYO ELECTRON LTD6 citations59
US10974181B2Apr 13, 2021
Filter unit pretreatment method, treatment liquid supply apparatus, filter unit heating apparatus, and treatment liquid supply passage pretreatment method
TOKYO ELECTRON LTD0 citations58
US11567444B2Jan 31, 2023
Developing treatment apparatus and developing treatment method
TOKYO ELECTRON LTD0 citations53
US9975073B2May 22, 2018
Processing liquid supply method, processing liquid supply apparatus and storage medium
TOKYO ELECTRON LTD1 citations51
US10493387B2Dec 3, 2019
Filter unit pretreatment method, treatment liquid supply apparatus, filter unit heating apparatus, and treatment liquid supply passage pretreatment method
TOKYO ELECTRON LTD0 citations48
US9805958B2Oct 31, 2017
Substrate cleaning apparatus, substrate cleaning method and non-transitory storage medium
TOKYO ELECTRON LTD0 citations48
US11433420B2Sep 6, 2022
Solution supply apparatus and solution supply method
TOKYO ELECTRON LTD0 citations45