Inventor
VAN BUSKIRK PETER C
US50 patents
⚠️ This page may combine multiple inventors who share the name “VAN BUSKIRK PETER C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED TECH MATERIALS
30 patentsUS5972430AOct 26, 1999
Digital chemical vapor deposition (CVD) method for forming a multi-component oxide layer
ADVANCED TECH MATERIALS417 citations99
US5719417AFeb 17, 1998
Ferroelectric integrated circuit structure
ADVANCED TECH MATERIALS154 citations98
US5705443AJan 6, 1998
Etching method for refractory materials
ADVANCED TECH MATERIALS208 citations98
US5653806AAug 5, 1997
Showerhead-type discharge assembly for delivery of source reagent vapor to a substrate, and CVD process utilizing same
ADVANCED TECH MATERIALS105 citations98
US5876503AMar 2, 1999
Multiple vaporizer reagent supply system for chemical vapor deposition utilizing dissimilar precursor compositions
ADVANCED TECH MATERIALS117 citations97
US6284654B1Sep 4, 2001
Chemical vapor deposition process for fabrication of hybrid electrodes
ADVANCED TECH MATERIALS74 citations96
US6184550B1Feb 6, 2001
Ternary nitride-carbide barrier layers
ADVANCED TECH MATERIALS54 citations96
US5741363AApr 21, 1998
Interiorly partitioned vapor injector for delivery of source reagent vapor mixtures for chemical vapor deposition
ADVANCED TECH MATERIALS59 citations96
US6316797B1Nov 13, 2001
Scalable lead zirconium titanate(PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material
ADVANCED TECH MATERIALS67 citations95
US5998236ADec 7, 1999
Process for controlled orientation of ferroelectric layers
ADVANCED TECH MATERIALS59 citations95
US6254792B1Jul 3, 2001
Isotropic dry cleaning process for noble metal integrated circuit structures
ADVANCED TECH MATERIALS78 citations94
US6010748AJan 4, 2000
Method of delivering source reagent vapor mixtures for chemical vapor deposition using interiorly partitioned injector
ADVANCED TECH MATERIALS40 citations93
US7951225B2May 31, 2011
Fluid storage and dispensing systems, and fluid supply processes comprising same
ADVANCED TECH MATERIALS22 citations92
US7005303B2Feb 28, 2006
Low temperature chemical vapor deposition process for forming bismuth-containing ceramic thin films useful in ferroelectric memory devices
ADVANCED TECH MATERIALS27 citations92
US6984417B2Jan 10, 2006
Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material
ADVANCED TECH MATERIALS15 citations92
US6730523B2May 4, 2004
Low temperature chemical vapor deposition process for forming bismuth-containing ceramic thin films useful in ferroelectric memory devices
ADVANCED TECH MATERIALS17 citations92
US6709610B2Mar 23, 2004
Isotropic dry cleaning process for noble metal integrated circuit structures
ADVANCED TECH MATERIALS14 citations92
US6303391B1Oct 16, 2001
Low temperature chemical vapor deposition process for forming bismuth-containing ceramic films useful in ferroelectric memory devices
ADVANCED TECH MATERIALS27 citations92
US6177135B1Jan 23, 2001
Low temperature CVD processes for preparing ferroelectric films using Bi amides
ADVANCED TECH MATERIALS34 citations92
US9073028B2Jul 7, 2015
Liner-based liquid storage and dispensing systems with empty detection capability
ADVANCED TECH MATERIALS18 citations91
US6846424B2Jan 25, 2005
Plasma-assisted dry etching of noble metal-based materials
ADVANCED TECH MATERIALS24 citations91
US6500489B1Dec 31, 2002
Low temperature CVD processes for preparing ferroelectric films using Bi alcoxides
ADVANCED TECH MATERIALS15 citations84
US7344589B2Mar 18, 2008
Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material
ADVANCED TECH MATERIALS9 citations83
US7012292B1Mar 14, 2006
Oxidative top electrode deposition process, and microelectronic device structure
ADVANCED TECH MATERIALS11 citations83
US6699402B2Mar 2, 2004
Chemical mechanical polishing compositions for CMP removal of iridium thin films
ADVANCED TECH MATERIALS14 citations81
US6511856B2Jan 28, 2003
Confinement of E-fields in high density ferroelectric memory device structures
ADVANCED TECH MATERIALS11 citations74
US6342711B1Jan 29, 2002
Confinement of E-fields in high density ferroelectric memory device structures
ADVANCED TECH MATERIALS8 citations74
US6180420B1Jan 30, 2001
Low temperature CVD processes for preparing ferroelectric films using Bi carboxylates
ADVANCED TECH MATERIALS12 citations74
US7862857B2Jan 4, 2011
Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material
ADVANCED TECH MATERIALS3 citations73
US7705382B2Apr 27, 2010
Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material
ADVANCED TECH MATERIALS6 citations73
ROEDER JEFFREY F
5 patentsUS12035720B2Jul 16, 2024
Antimicrobial surface systems
ROEDER JEFFREY F0 citations56
US10541429B2Jan 21, 2020
SOFC interconnect barriers and methods of making same using masks
ROEDER JEFFREY F0 citations51
US10141582B2Nov 27, 2018
SOFC interconnect barriers and methods of making same
ROEDER JEFFREY F0 citations51
US10381655B2Aug 13, 2019
Surface modified SOFC cathode particles and methods of making same
ROEDER JEFFREY F0 citations48
US11958765B2Apr 16, 2024
Combined VOC mitigating and antimicrobial systems
ROEDER JEFFREY F0 citations47
ENTEGRIS INC
4 patentsUS10247363B2Apr 2, 2019
Smart package
ENTEGRIS INC7 citations82
US10845006B2Nov 24, 2020
Smart package
ENTEGRIS INC2 citations70
US9802749B2Oct 31, 2017
Liner-based liquid storage and dispensing systems with empty detection capability
ENTEGRIS INC1 citations61
US10508773B2Dec 17, 2019
Smart package
ENTEGRIS INC0 citations49
VAN BUSKIRK PETER C
4 patentsUS12083477B2Sep 10, 2024
Photocatalytic fluid purification systems
VAN BUSKIRK PETER C0 citations60
US11857924B2Jan 2, 2024
Photocatalytic fluidized bed reactor systems
VAN BUSKIRK PETER C0 citations58
US11052385B2Jul 6, 2021
Photocatalytic surface systems
VAN BUSKIRK PETER C1 citations56
US9480766B2Nov 1, 2016
Photocatalytic devices and systems
VAN BUSKIRK PETER C1 citations51