P

Inventor

VAN BUSKIRK PETER C

US50 patents
⚠️ This page may combine multiple inventors who share the name “VAN BUSKIRK PETER C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADVANCED TECH MATERIALS

30 patents
US5972430AOct 26, 1999

Digital chemical vapor deposition (CVD) method for forming a multi-component oxide layer

ADVANCED TECH MATERIALS417 citations99
US5719417AFeb 17, 1998

Ferroelectric integrated circuit structure

ADVANCED TECH MATERIALS154 citations98
US5705443AJan 6, 1998

Etching method for refractory materials

ADVANCED TECH MATERIALS208 citations98
US5653806AAug 5, 1997

Showerhead-type discharge assembly for delivery of source reagent vapor to a substrate, and CVD process utilizing same

ADVANCED TECH MATERIALS105 citations98
US5876503AMar 2, 1999

Multiple vaporizer reagent supply system for chemical vapor deposition utilizing dissimilar precursor compositions

ADVANCED TECH MATERIALS117 citations97
US6284654B1Sep 4, 2001

Chemical vapor deposition process for fabrication of hybrid electrodes

ADVANCED TECH MATERIALS74 citations96
US6184550B1Feb 6, 2001

Ternary nitride-carbide barrier layers

ADVANCED TECH MATERIALS54 citations96
US5741363AApr 21, 1998

Interiorly partitioned vapor injector for delivery of source reagent vapor mixtures for chemical vapor deposition

ADVANCED TECH MATERIALS59 citations96
US6316797B1Nov 13, 2001

Scalable lead zirconium titanate(PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material

ADVANCED TECH MATERIALS67 citations95
US5998236ADec 7, 1999

Process for controlled orientation of ferroelectric layers

ADVANCED TECH MATERIALS59 citations95
US6254792B1Jul 3, 2001

Isotropic dry cleaning process for noble metal integrated circuit structures

ADVANCED TECH MATERIALS78 citations94
US6010748AJan 4, 2000

Method of delivering source reagent vapor mixtures for chemical vapor deposition using interiorly partitioned injector

ADVANCED TECH MATERIALS40 citations93
US7951225B2May 31, 2011

Fluid storage and dispensing systems, and fluid supply processes comprising same

ADVANCED TECH MATERIALS22 citations92
US7005303B2Feb 28, 2006

Low temperature chemical vapor deposition process for forming bismuth-containing ceramic thin films useful in ferroelectric memory devices

ADVANCED TECH MATERIALS27 citations92
US6984417B2Jan 10, 2006

Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material

ADVANCED TECH MATERIALS15 citations92
US6730523B2May 4, 2004

Low temperature chemical vapor deposition process for forming bismuth-containing ceramic thin films useful in ferroelectric memory devices

ADVANCED TECH MATERIALS17 citations92
US6709610B2Mar 23, 2004

Isotropic dry cleaning process for noble metal integrated circuit structures

ADVANCED TECH MATERIALS14 citations92
US6303391B1Oct 16, 2001

Low temperature chemical vapor deposition process for forming bismuth-containing ceramic films useful in ferroelectric memory devices

ADVANCED TECH MATERIALS27 citations92
US6177135B1Jan 23, 2001

Low temperature CVD processes for preparing ferroelectric films using Bi amides

ADVANCED TECH MATERIALS34 citations92
US9073028B2Jul 7, 2015

Liner-based liquid storage and dispensing systems with empty detection capability

ADVANCED TECH MATERIALS18 citations91
US6846424B2Jan 25, 2005

Plasma-assisted dry etching of noble metal-based materials

ADVANCED TECH MATERIALS24 citations91
US6500489B1Dec 31, 2002

Low temperature CVD processes for preparing ferroelectric films using Bi alcoxides

ADVANCED TECH MATERIALS15 citations84
US7344589B2Mar 18, 2008

Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material

ADVANCED TECH MATERIALS9 citations83
US7012292B1Mar 14, 2006

Oxidative top electrode deposition process, and microelectronic device structure

ADVANCED TECH MATERIALS11 citations83
US6699402B2Mar 2, 2004

Chemical mechanical polishing compositions for CMP removal of iridium thin films

ADVANCED TECH MATERIALS14 citations81
US6511856B2Jan 28, 2003

Confinement of E-fields in high density ferroelectric memory device structures

ADVANCED TECH MATERIALS11 citations74
US6342711B1Jan 29, 2002

Confinement of E-fields in high density ferroelectric memory device structures

ADVANCED TECH MATERIALS8 citations74
US6180420B1Jan 30, 2001

Low temperature CVD processes for preparing ferroelectric films using Bi carboxylates

ADVANCED TECH MATERIALS12 citations74
US7862857B2Jan 4, 2011

Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material

ADVANCED TECH MATERIALS3 citations73
US7705382B2Apr 27, 2010

Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material

ADVANCED TECH MATERIALS6 citations73

ROEDER JEFFREY F

5 patents

ENTEGRIS INC

4 patents

VAN BUSKIRK PETER C

4 patents

PETRUSKA MELISSA A

2 patents

INTERSURFACE DYNAMICS INC

1 patent

HOVINEN MINNA

1 patent

OLANDER W KARL

1 patent

SILICON STORAGE TECH INC

1 patent

ZEBEROFF ANTHONY F

1 patent