Inventor
LIN TZU-KAI
TW14 patents
⚠️ This page may combine multiple inventors who share the name “LIN TZU-KAI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
13 patentsUS10014224B2Jul 3, 2018
Structure and formation method of fin-like field effect transistor
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84
US9502538B2Nov 22, 2016
Structure and formation method of fin-like field effect transistor
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations84
US9490365B2Nov 8, 2016
Structure and formation method of fin-like field effect transistor
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US10037921B2Jul 31, 2018
Structure and formation method of fin-like field effect transistor
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9490346B2Nov 8, 2016
Structure and formation method of fin-like field effect transistor
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US9570557B2Feb 14, 2017
Tilt implantation for STI formation in FinFET structures
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US12131911B2Oct 29, 2024
CMP process and methods thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12087643B2Sep 10, 2024
Structure and formation method of fin-like field effect transistor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11393727B2Jul 19, 2022
Structure and formation method of fin-like field effect transistor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12521838B2Jan 13, 2026
Microwave and infrared heating units for wet chemicals
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11517995B2Dec 6, 2022
Wet chemical heating system and a method of chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11387109B1Jul 12, 2022
CMP process and methods thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10727137B2Jul 28, 2020
Structure and formation method of fin-like field effect transistor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52